MEMS Technology

Micro-Electro-Mechanical Systems (MEMS) is an emerging technology for making microscopic machines. Using microfabrication technology, MEMS integrates actuators, mechanical elements, sensors and electronics on a common silicon substrate. MEMS is a groundbreaking technology which makes possible the realization of a complete systems-on-a-chip by fusion of silicon-based microelectronics with micromachining technology.